Pre-installed Gases | MV-101 | MV-102 | MV-104 | MV-106 |
Air, N2, O2, CO2, CO and N2O | 10 .. 200 mln/min | 20 .. 2000 mln/min | 0.04 .. 20 ln/min | 0.4 .. 200 ln/min |
Ar | not available | 40 .. 4000 mln/min | 0.08 .. 40 ln/min | 0.8 .. 400 ln/min |
CH4, C3H8 and C4H10 | not available | 10 .. 1000 mln/min | 0.02 .. 10 ln/min | 0.2 .. 100 ln/min |
Helium | Flow ranges | |||
MV-191-HE | 20 .. 200 mln/min | |||
MV-192-HE | 50 .. 2000 mln/min | |||
MV-194-HE | 0,1 .. 20 mln/min | |||
MV-196-HE | 0,2 .. 100 mln/min | |||
Hydrogen | Flow ranges | |||
MV-191-H2 | 20 .. 200 mln/min | |||
MV-192-H2 | 50 .. 1000 mln/min | |||
MV-194-H2 | 0,1 .. 10 mln/min | |||
MV-196-H2 | 0,2 .. 100 mln/min |