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  • EL-FLOW SELECT series  제품이미지

    EL-FLOW SELECT series | GAS 용 질량유량계MFC
    조회 : 8228
  • 제품설명

    EL-FLOW 씨리즈의 기체용 질량유량계는 연구실 및 Clean 공정을 요하는 환경에 적합한 하우징으로
    다양한 기체 및 유량 범위의 정밀유량 측정 및 제어 용도로 이미 현장 및 시장내 입증된 제품입니다.
     
    lowest ranges 0,014 ... 0,7 mln/min
    up to highest ranges 8 ... 1670 ln/min

  • Features

    High accuracy (standard 0,5% Rd plus 0,1% FS)
    Rangeability in digital mode up to 1:187,5
    Fast response (down to 500 msec), excellent repeatability
    Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
    Pressure ratings 64 / 100 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
    High pressure versions available
    Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
    Electro-chemical polishing of all surfaces
    Compact, modular construction
    Metal sealed and down ported version available

  • Flow capacities (based on air)

    Mass Flow Meter (MFM);                                     
    PN100 (Pressure rating 100bar)              
    Ranges                                                        
    Series F-110C
    min. 0,014 ... 0,7 mln/min
    max. 0,06 ... 9 mln/min
    Series F-111B
    min. 0,16 ... 8 mln/min
    max. 0,16 ... 25 ln/min
    Series F-111AC
    min. 0,4 ... 20 ln/min
    max. 0,6 ... 100 ln/min
    Series F-112AC
    min. 0,8 ... 40 ln/min
    max. 1,4 ... 250 ln/min
    Series F-113AC
    min. 4 ... 200 ln/min
    max. 8 ... 1670 ln/min
    Mass Flow Controller (MFC);
    PN64 / PN100                     
    Ranges                                  
    Series F-200CV / F-210CV 1)
    min. 0,014 ... 0,7 mln/min
    max. 0,06 ... 9 mln/min
    Series F-201CV / F-211CV 1)
    min. 0,16 ... 8 mln/min
    max. 0,16 ... 25 ln/min
    Series F-201AV / F-211AV 1)
    min. 0,4 ... 20 ln/min
    max. 0,6 ... 100 ln/min
    Series F-202AV / F-212AV 2)
    min. 0,8 ... 40 ln/min
    max. 1,4 ... 250 ln/min
    Series F-203AV / F-213AV 2)
    min. 4 ... 200 ln/min
    max. 8 ... 1670 ln/min
     
    1) with small type of valve for normal applications
    2) with pilot-operated valve for high flow applications; MG/MR option not yet available for these models